Issued Patents All Time
Showing 101–125 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8473247 | Methods for monitoring processing equipment | James P. Cruse, Dermot Cantwell, Thorsten Kril, Charles Hardy | 2013-06-25 |
| 8322963 | End effector for a cluster tool | Jeffrey C. Hudgens, Jagan Rangarajan, Penchala N. Kankanala | 2012-12-04 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 8078304 | Dual-mode robot systems and methods for electronic device manufacturing | Jeffrey C. Hudgens, Todd Egan, Ingrid B. Peterson | 2011-12-13 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Eric A. Englhardt, Helen R. Armer, Chongyang Wang | 2011-09-13 |
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Ajit Balakrishna +6 more | 2011-06-28 |
| 7927062 | Methods and apparatus for transferring substrates during electronic device manufacturing | Nicholas Cravalho, Jeffrey A. Brodine | 2011-04-19 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Eric A. Englhardt, Jeffrey C. Hudgens, Kirk Van Katwyk | 2011-04-19 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7914248 | Methods and apparatus for repositioning support for a substrate carrier | Martin R. Elliott | 2011-03-29 |
| 7912576 | Calibration of high speed loader to substrate transport system | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |
| 7857570 | Method and apparatus for supplying substrates to a processing tool | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-12-28 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant +3 more | 2010-11-16 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II, Mohsen Salek +3 more | 2010-10-26 |
| 7798309 | Stabilizing substrate carriers during overhead transport | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2010-09-21 |
| 7792608 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-09-07 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7720655 | Extended mainframe designs for semiconductor device manufacturing equipment | — | 2010-05-18 |
| 7711445 | Systems and methods for transferring small lot size substrate carriers between processing tools | Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2010-05-04 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7684895 | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2010-03-23 |
| 7673735 | System for transporting substrate carriers | Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2010-03-09 |