Issued Patents All Time
Showing 51–75 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11049740 | Reconfigurable mainframe with replaceable interface plate | — | 2021-06-29 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Richard Fovell, Vijay D. Parkhe | 2021-06-22 |
| 11003149 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Dean C. Hruzek | 2021-05-11 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |
| 10943805 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Karuppasamy Muthukamatchi, Nir Merry | 2021-03-09 |
| 10847390 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine | 2020-11-24 |
| 10847391 | Semiconductor device manufacturing platform with single and twinned processing chambers | Nir Merry, Sushant S. Koshti, Jeffrey C. Hudgens | 2020-11-24 |
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi | 2020-09-29 |
| 10763134 | Substrate processing apparatus and methods with factory interface chamber filter purge | — | 2020-09-01 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe +1 more | 2020-08-04 |
| 10720348 | Dual load lock chamber | — | 2020-07-21 |
| 10665476 | Substrate processing system, valve assembly, and processing method | Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Brent Vopat | 2020-05-26 |
| 10615004 | Distributed electrode array for plasma processing | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman | 2020-04-07 |
| 10595415 | Electronic device manufacturing system | Jeffrey C. Hudgens | 2020-03-17 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun | 2020-02-18 |
| 10553469 | Sealed substrate carriers and systems and methods for transporting substrates | Jeffrey C. Hudgens | 2020-02-04 |
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Kallol Bera, James D. Carducci +1 more | 2019-12-17 |
| 10443126 | Zone-controlled rare-earth oxide ALD and CVD coatings | Xiaowei Wu, Jennifer Y. Sun | 2019-10-15 |
| 10443125 | Flourination process to create sacrificial oxy-flouride layer | Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun | 2019-10-15 |
| 10418225 | Distributed electrode array for plasma processing | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman | 2019-09-17 |
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Sushant S. Koshti, Steven E. Babayan, Jennifer Y. Sun | 2019-09-10 |
| 10395964 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Matthew J. Busche, Vijay D. Parkhe | 2019-08-27 |
| 10388547 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine | 2019-08-20 |
| 10373807 | Distributed electrode array for plasma processing | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman | 2019-08-06 |