Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615004 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Yue Guo | 2020-04-07 |
| 10418225 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Yue Guo | 2019-09-17 |
| 10373807 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Yue Guo | 2019-08-06 |
| 10312056 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Yue Guo | 2019-06-04 |
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, James D. Carducci +2 more | 2017-10-24 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart | 2017-02-14 |
| 9196462 | Showerhead insulator and etch chamber liner | James D. Carducci | 2015-11-24 |
| 8876024 | Heated showerhead assembly | James D. Carducci, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart | 2014-11-04 |
| 7777599 | Methods and apparatus for controlling characteristics of a plasma | Steven C. Shannon, Daniel J. Hoffman, Matthew L. Miller, Kenneth S. Collins, Kartik Ramaswamy +1 more | 2010-08-17 |
| 7196283 | Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface | Douglas A. Buchberger, Jr., Daniel J. Hoffman, James D. Carducci, Keiji Horioka, Jang-Gyoo Yang | 2007-03-27 |