Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665476 | Substrate processing system, valve assembly, and processing method | Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Michael R. Rice | 2020-05-26 |
| 8796589 | Processing system with the dual end-effector handling | Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Michael R. Rice | 2014-08-05 |