Issued Patents All Time
Showing 151–175 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7299831 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-11-27 |
| 7293642 | Methods and apparatus for transporting substrate carriers | Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-11-13 |
| 7258520 | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt, Loy Randall Stuart | 2007-08-21 |
| 7243003 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-07-10 |
| 7234584 | System for transporting substrate carriers | Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-06-26 |
| 7233841 | Vision system | Iraj Sadighi, Jeff Hudgens, Gary Wyka | 2007-06-19 |
| 7230702 | Monitoring of smart pin transition timing | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2007-06-12 |
| 7223526 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Timothy Weidman, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2007-05-29 |
| 7221993 | Systems and methods for transferring small lot size substrate carriers between processing tools | Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2007-05-22 |
| 7168553 | Dynamically balanced substrate carrier handler | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2007-01-30 |
| 7156221 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2007-01-02 |
| 7085622 | Vision system | Iraj Sadighi, Jeff Hudgens, Gary Wyka | 2006-08-01 |
| 7077264 | Methods and apparatus for transporting substrate carriers | Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2006-07-18 |
| 7039501 | Method for determining a position of a robot | Marvin L. Freeman, Jeffrey C. Hudgens, Damon K. Cox, Chris Pencis, David A. Van Gogh | 2006-05-02 |
| 6955197 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2005-10-18 |
| 6841341 | Method of depositing an amorphous carbon layer | Kevin Fairbairn, Timothy Weidman, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2005-01-11 |
| 6797189 | Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Kenneth S. Collins, Chunshi Cui | 2004-09-28 |
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Kenneth S. Collins, Farahmand Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-09-14 |
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-05-18 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Martin R. Elliott, Chris Pencis, Jeffrey C. Hudgens | 2003-06-24 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Timothy Weidman, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2003-06-03 |
| 6556887 | Method for determining a position of a robot | Marvin L. Freeman, Jeffrey C. Hudgens, Damon K. Cox, Chris Pencis, David A. Van Gogh | 2003-04-29 |
| 6544429 | Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition | Hoiman Hung, Joseph P. Caulfield, Hongchin Shan, Kenneth S. Collins, Chunshi Cui | 2003-04-08 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |