Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7258520 | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2007-08-21 |