Issued Patents All Time
Showing 176–200 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Eric Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2003-02-04 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2002-09-24 |
| 6444085 | Inductively coupled RF plasma reactor having an antenna adjacent a window electrode | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Craig A. Roderick | 2002-09-03 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Eric Askarinam, Edwin C. Weldon +1 more | 2002-08-27 |
| 6440866 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 2002-08-27 |
| 6365063 | Plasma reactor having a dual mode RF power application | Kenneth S. Collins, Farahmand Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2002-04-02 |
| 6238588 | High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process | Kenneth S. Collins, David W. Groechel, Raymond Hung, Gerald Yin, Jian Ding +1 more | 2001-05-29 |
| 6218312 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 2001-04-17 |
| 6165311 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Craig A. Roderick | 2000-12-26 |
| 6095083 | Vacuum processing chamber having multi-mode access | Eric Askarinam, Gerhard Schneider, Kenneth S. Collins | 2000-08-01 |
| 6083412 | Plasma etch apparatus with heated scavenging surfaces | Jeffrey Marks, David W. Groechel, Nicolas Bright | 2000-07-04 |
| 6077384 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-06-20 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2000-06-13 |
| 6063233 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Eric Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2000-05-16 |
| 6054013 | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-04-25 |
| 6036877 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 2000-03-14 |
| 6024826 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 2000-02-15 |
| 6019360 | Plastic pipe vise | — | 2000-02-01 |
| 5990017 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 1999-11-23 |
| 5980194 | Wafer position error detection and correction system | Frederik W. Freerks, Lloyd M. Berken, M. Uenia Crithfield, David Schott, Michael Holtzman +4 more | 1999-11-09 |
| 5960072 | Method and apparatus for altering the access format of telephone calls | John A. Hird, Lindsey D. Owen | 1999-09-28 |
| 5925212 | Apparatus and method for attaining repeatable temperature versus time profiles for plasma heated interactive parts used in mass production plasma processing | David W. Groechel, James P. Cruse, Kenneth S. Collins | 1999-07-20 |
| 5770099 | Plasma etch apparatus with heated scavenging surfaces | Jeffrey Marks, David W. Groechel, Nicolas Bright | 1998-06-23 |
| 5722668 | Protective collar for vacuum seal in a plasma etch reactor | Eric Askarinam | 1998-03-03 |
| 5483581 | Method and apparatus for performing an automated collect call | John A. Hird, Lindsey D. Owen | 1996-01-09 |