Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709218 | Robot blade for semiconductor processing equipment | Tetsuya Ishikawa, Timothy Wang, Jeffrey C. Hudgens, James R. Ciulik, Mohsen Salek +2 more | 2004-03-23 |
| 6089543 | Two-piece slit valve door with molded-in-place seal for a vacuum processing system | — | 2000-07-18 |
| 5980194 | Wafer position error detection and correction system | Lloyd M. Berken, M. Uenia Crithfield, David Schott, Michael R. Rice, Michael Holtzman +4 more | 1999-11-09 |
| 5740062 | Wafer positioning system | Lloyd M. Berken, William H. Jarvi, Hatice Sahin | 1998-04-14 |
| 5563798 | Wafer positioning system | Lloyd M. Berken, William H. Jarvi, Hatice Sahin | 1996-10-08 |
| 5525024 | Cassette loader having compound translational motion | Kenneth D. Ames | 1996-06-11 |