Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5740062 | Wafer positioning system | Lloyd M. Berken, Frederik W. Freerks, William H. Jarvi | 1998-04-14 |
| 5563798 | Wafer positioning system | Lloyd M. Berken, Frederik W. Freerks, William H. Jarvi | 1996-10-08 |