Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475356 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Simon Wing-Lok Hui, Seshadri Ramaswami | 2002-11-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475356 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Simon Wing-Lok Hui, Seshadri Ramaswami | 2002-11-05 |