Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7949686 | Method and apparatus for scalable transport processing fulfillment system | Alvin Chang, Yulia Groza, Nathaniel D. Harward, Steven S. Chen | 2011-05-24 |
| 7822779 | Method and apparatus for scalable transport processing fulfillment system | Alvin Chang, Yulia Groza, Nathaniel D. Harward, Steven S. Chen | 2010-10-26 |
| 6475356 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Ken Ngan, Seshadri Ramaswami | 2002-11-05 |