Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899799 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Kenny King-Tai Ngan, Seshadri Ramaswami | 2005-05-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899799 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Kenny King-Tai Ngan, Seshadri Ramaswami | 2005-05-31 |