Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6139701 | Copper target for sputter deposition | Vikram Pavate, Murali Abburi, Murali Narasimhan | 2000-10-31 |
| 6126791 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Jaim Nulman | 2000-10-03 |
| 6086725 | Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life | Murali Abburi | 2000-07-11 |
| 6059872 | Smooth titanium nitride films having low resistivity | Kenny King-Tai Ngan | 2000-05-09 |
| 6046100 | Method of fabricating a fabricating plug and near-zero overlap interconnect line | Jaim Nulman | 2000-04-04 |
| 6001227 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Jaim Nulman | 1999-12-14 |
| 5925225 | Method of producing smooth titanium nitride films having low resistivity | Kenny King-Tai Ngan | 1999-07-20 |
| 5882399 | Method of forming a barrier layer which enables a consistently highly oriented crystalline structure in a metallic interconnect | Kenny King-Tai Ngan, Barry L. Hogan | 1999-03-16 |
| 5614446 | Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer | Darin A. Chan | 1997-03-25 |
| 5539247 | Selective metal via plug growth technology for deep sub-micrometer ULSI | Robin Cheung, David F. Kyser | 1996-07-23 |
| 5456756 | Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer | Darin A. Chan | 1995-10-10 |
| 5453402 | Selective metal via plug growth technology for deep sub-micrometer ULSI | Robin Cheung, David F. Kyser | 1995-09-26 |
| 5451545 | Process for forming stable local interconnect/active area silicide structure VLSI applications | Robin Cheung | 1995-09-19 |
| 5365111 | Stable local interconnect/active area silicide structure for VLSI applications | Robin Cheung | 1994-11-15 |