Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5655110 | Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers | Zoran Krivokapic, William D. Heavlin | 1997-08-05 |
| 5646870 | Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers | Zoran Krivokapic, William D. Heavlin | 1997-07-08 |
| 5539247 | Selective metal via plug growth technology for deep sub-micrometer ULSI | Robin Cheung, Seshadri Ramaswami | 1996-07-23 |
| 5453402 | Selective metal via plug growth technology for deep sub-micrometer ULSI | Robin Cheung, Seshadri Ramaswami | 1995-09-26 |