Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Profile control platen

Profile control platen

US Patent 7115024 · Granted Oct 3, 2006

Estimated economic value: $12,847,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Determining substrate orientation with acoustic signals2025
Chemical mechanical polishing vibration measurement using optical sensor2025
Chemical mechanical polishing vibration measurement using optical sensor2025
Retaining ring having inner surfaces with features2025
Determining substrate precession with acoustic signals2025
High throughput polishing modules and modular polishing systems2025
High throughput polishing modules and modular polishing systems2025
Chemical mechanical polishing correction tool2025
Control of processing parameters for substrate polishing with substrate precessi2025
Control of processing parameters for substrate polishing with substrate precessi2025
Multiple disk pad conditioner2025