Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513111 | Forming semiconductor structures | Robert Meagley, Kevin P. O'Brien, Tian-An Chen, Michael Goodner, James M. Powers | 2013-08-20 |
| 7867687 | Methods and compositions for reducing line wide roughness | Wang Yueh, Hai Deng, Hok-Kin Choi | 2011-01-11 |
| 7469443 | Brush for cleaning wafer | Alexander Tregub, Mansour Moinpour | 2008-12-30 |
| 7391501 | Immersion liquids with siloxane polymer for immersion lithography | Hai Deng, Yueh-Chih Wang, Hok-Kin Choi, Robert Meagley, Ernisse Putna | 2008-06-24 |
| 7303985 | Zeolite-carbon doped oxide composite low k dielectric | Hai Deng | 2007-12-04 |
| 7125793 | Method for forming an opening for an interconnect structure in a dielectric layer having a photosensitive material | Wang Yueh | 2006-10-24 |
| 7071125 | Precursors for film formation | Michael L. McSwiney, Michael Goodner, Robert Leet, Robert Meagley | 2006-07-04 |
| 6995073 | Air gap integration | — | 2006-02-07 |
| 6864192 | Langmuir-blodgett chemically amplified photoresist | Hai Deng, Wang Yueh, Hok-Kin Choi | 2005-03-08 |