Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115581 | Removal of particles on back side of wafer | Hsun-Peng Lin, Hsin-Kuo Chang, Han-Chih Chung, Chi-Jen Hsieh | 2018-10-30 |
| 7391501 | Immersion liquids with siloxane polymer for immersion lithography | Hai Deng, Huey-Chiang Liou, Hok-Kin Choi, Robert Meagley, Ernisse Putna | 2008-06-24 |