Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871720 | Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer | Astha Sharma, Chia-Hung Lai, Jaw-Lih Shih, Hong-Hsing Chou | 2020-12-22 |
| 10115581 | Removal of particles on back side of wafer | Hsun-Peng Lin, Han-Chih Chung, Yueh-Chih Wang, Chi-Jen Hsieh | 2018-10-30 |
| 9128387 | Ultraviolet light emitting diode array light source for photolithography and method | Jaw-Lih Shih, Hong-Hsing Chou, Yeh-Chieh Wang, Chung-Nan Chen, Kuang Hsiung Cheng | 2015-09-08 |