Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8551675 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Fu-Chang Lo | 2013-10-08 |
| 8012651 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Fu-Chang Lo | 2011-09-06 |
| 7763395 | Radiation stability of polymer pellicles | Florence Eschbach, James M. Powers, Fu-Chang Lo | 2010-07-27 |
| 7469443 | Brush for cleaning wafer | Huey-Chiang Liou, Mansour Moinpour | 2008-12-30 |
| 7383723 | Detecting particle agglomeration in chemical mechanical polishing slurries | Mansour Moinpour | 2008-06-10 |
| 7316869 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Fu-Chang Lo | 2008-01-08 |
| 7314667 | Process to optimize properties of polymer pellicles and resist for lithography applications | Florence Eschbach, Fu-Chang Lo, Susan Holl | 2008-01-01 |
| 7288299 | Fullerenes to increase radiation resistance in polymer-based pellicles | Tim Chen, Susan Holl | 2007-10-30 |
| 7288300 | Fullerenes to increase radiation resistance in polymer-based pellicles | Tim Chen, Susan Holl | 2007-10-30 |
| 7264853 | Attaching a pellicle frame to a reticle | Florence Eschbach, Paul A. Zimmerman, Fu-Chang Lo | 2007-09-04 |
| 7048610 | Conditioning polishing pad for chemical-mechanical polishing | Mansour Moinpour, Victor K. Souw | 2006-05-23 |