Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8551675 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Alexander Tregub | 2013-10-08 |
| 8012651 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Alexander Tregub | 2011-09-06 |
| 7763395 | Radiation stability of polymer pellicles | Alexander Tregub, Florence Eschbach, James M. Powers | 2010-07-27 |
| 7316869 | Mounting a pellicle to a frame | Florence Eschbach, Paul A. Zimmerman, Alexander Tregub | 2008-01-08 |
| 7314667 | Process to optimize properties of polymer pellicles and resist for lithography applications | Alexander Tregub, Florence Eschbach, Susan Holl | 2008-01-01 |
| 7264853 | Attaching a pellicle frame to a reticle | Florence Eschbach, Paul A. Zimmerman, Alexander Tregub | 2007-09-04 |
| 6607862 | Damascene extreme ultraviolet lithography alternative phase shift photomask and method of making | Pei-Yang Yan | 2003-08-19 |