| 12497694 |
Method of forming low-resistivity Ru ALD through a bi-layer process and related structures |
Andrew C. Kummel, Michael Breeden, Victor Wang, Ravindra KANJOLIA, Mansour Moinpour |
2025-12-16 |
|
| 12456647 |
Nanosheet transistor devices and related fabrication methods |
Min He, Jaekyung PARK, Chihak Ahn, Mehdi Saremi, Rebecca Park +1 more |
2025-10-28 |
|
| 12356665 |
Stacked transistors having an isolation region therebetween and a common gate electrode, and related fabrication methods |
Seungchan Yun, Inchan Hwang, Gunho Jo, Jeonghyuk Yim, Byounghak Hong +6 more |
2025-07-08 |
|
| 11978668 |
Integrated circuit devices including a via and methods of forming the same |
Ming He, Anthony Dongick LEE, Seowoo Nam, Sang-Hoon Ahn |
2024-05-07 |
|
| 11769686 |
Methods and apparatus for electroless plating dispense |
Harinath Reddy, Christopher D. Thomas |
2023-09-26 |
$20,953,000 |
| 11705363 |
Fully aligned via integration with selective catalyzed vapor phase grown materials |
Ming He, Rebecca Park |
2023-07-18 |
|
| 11537898 |
Generative structure-property inverse computational co-design of materials |
Ganesh Hegde |
2022-12-27 |
|
| 11289419 |
Interconnects having long grains and methods of manufacturing the same |
Jorge A. Kittl, Ganesh Hegde |
2022-03-29 |
|
| 11087055 |
Method of screening materials using forward conducting modes |
Ganesh Hegde, Chris Bowen |
2021-08-10 |
|
| 11043454 |
Low resistivity interconnects with doped barrier layer for integrated circuits |
Ganesh Hegde |
2021-06-22 |
|
| 10957579 |
Integrated circuit devices including a via and methods of forming the same |
Yung Bae Kim, Jong Hyun Lee |
2021-03-23 |
|
| 10916513 |
Method and system for providing a reverse engineering resistant hardware embedded security module |
Ganesh Hegde, Joon Goo Hong, Rwik Sengupta, Mark S. Rodder |
2021-02-09 |
|
| 10825723 |
Semiconductor device and method for making the same |
Joon Goo Hong, Mark S. Rodder |
2020-11-03 |
|
| 10763207 |
Interconnects having long grains and methods of manufacturing the same |
Jorge A. Kittl, Ganesh Hegde |
2020-09-01 |
|
| 10381315 |
Method and system for providing a reverse-engineering resistant hardware embedded security module |
Ganesh Hegde, Joon Goo Hong, Rwik Sengupta, Mark S. Rodder |
2019-08-13 |
|
| 9932671 |
Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) |
James M. Blackwell, Patricio E. Romero, Scott B. Clendenning, Grant Kloster, Florian Gstrein +2 more |
2018-04-03 |
$16,515,000 |
| 8779589 |
Liner layers for metal interconnects |
Daniel J. Zierath, Michael Haverty, Sadasivan Shankar |
2014-07-15 |
$14,407,000 |
| 8425987 |
Surface charge enhanced atomic layer deposition of pure metallic films |
Juan E. Dominguez, Adrien LaVoie, John J. Plombon |
2013-04-23 |
$13,399,000 |
| 8344352 |
Using unstable nitrides to form semiconductor structures |
Juan E. Dominguez, Adrien LaVoie, John J. Plombon, Joseph H. Han |
2013-01-01 |
|
| 8319287 |
Tunable gate electrode work function material for transistor applications |
Adrien LaVoie, Valery M. Dubin, John J. Plombon, Juan E. Dominguez, Joseph H. Han +1 more |
2012-11-27 |
$12,455,000 |
| 8012878 |
Atomic layer volatilization process for metal layers |
Adrien LaVoie |
2011-09-06 |
$20,814,000 |
| 7982204 |
Using unstable nitrides to form semiconductor structures |
Juan E. Dominguez, Adrien LaVoie, John J. Plombon, Joseph H. Han |
2011-07-19 |
$15,862,000 |
| 7964746 |
Copper precursors for CVD/ALD/digital CVD of copper metal films |
Tianniu Chen, Chongying Xu, Thomas H. Baum, Bryan C. Hendrix, Jeffrey F. Roeder +2 more |
2011-06-21 |
$3,758,000 |
| 7858525 |
Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill |
Juan E. Dominguez, Adrien LaVoie, John J. Plombon, Joseph H. Han, Bryan C. Hendrix +1 more |
2010-12-28 |
$20,720,000 |
| 7851360 |
Organometallic precursors for seed/barrier processes and methods thereof |
Juan E. Dominguez, Adrien LaVoie, John J. Plombon, Joseph H. Han, David Thompson +1 more |
2010-12-14 |
$13,117,000 |
