| 12381161 |
Backside wafer treatments to reduce distortions and overlay errors during wafer chucking |
Tayseer Mahdi, Florian Gstrein |
2025-08-05 |
|
| 12165987 |
Frame reveals with maskless lithography in the manufacture of integrated circuits |
Robert L. Bristol |
2024-12-10 |
$13,394,000 |
| 11532724 |
Selective gate spacers for semiconductor devices |
Scott B. Clendenning, Szuya S. Liao, Florian Gstrein, Rami Hourani, Patricio E. Romero +1 more |
2022-12-20 |
$12,719,000 |
| 10971600 |
Selective gate spacers for semiconductor devices |
Scott B. Clendenning, Szuya S. Liao, Florian Gstrein, Rami Hourani, Patricio E. Romero +1 more |
2021-04-06 |
$36,336,000 |
| 10756215 |
Selective deposition utilizing sacrificial blocking layers for semiconductor devices |
Scott B. Clendenning, Rami Hourani, Szuya S. Liao, Patricio E. Romero, Florian Gstrein |
2020-08-25 |
$27,661,000 |
| 10396176 |
Selective gate spacers for semiconductor devices |
Scott B. Clendenning, Szuya S. Liao, Florian Gstrein, Rami Hourani, Patricio E. Romero +1 more |
2019-08-27 |
$17,353,000 |
| 10243080 |
Selective deposition utilizing sacrificial blocking layers for semiconductor devices |
Scott B. Clendenning, Rami Hourani, Szuya S. Liao, Patricio E. Romero, Florian Gstrein |
2019-03-26 |
$18,583,000 |
| 9932671 |
Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) |
James M. Blackwell, Patricio E. Romero, Scott B. Clendenning, Florian Gstrein, Harsono S. Simka +2 more |
2018-04-03 |
$16,515,000 |
| 9530733 |
Forming layers of materials over small regions by selective chemical reaction including limiting enchroachment of the layers over adjacent regions |
Robert L. Bristol, James M. Blackwell, Scott B. Clendenning, Florian Gstrein, Eungnak Han +3 more |
2016-12-27 |
$11,980,000 |
| 8154121 |
Polymer interlayer dielectric and passivation materials for a microelectronic device |
Kunal Gaurang Shah, Michael Haverty, Sadasivan Shankar, Doug B. Ingerly |
2012-04-10 |
$33,757,000 |
| 7658975 |
Sealing porous dielectric materials |
Robert Meagley, Michael Goodner, Kevin P. O'Brien |
2010-02-09 |
$29,195,000 |
| 7560165 |
Sealing porous dielectric materials |
Robert Meagley, Michael Goodner, Kevin P. O'Brien, Don Bruner |
2009-07-14 |
$21,399,000 |
| 7544896 |
Forming a porous dielectric layer and structures formed thereby |
Boyan Boyanov, Vijay Ramachandrarao, Hyun-Mog Park |
2009-06-09 |
$25,076,000 |
| 7456490 |
Sealing porous dielectrics with silane coupling reagents |
Chih-I Wu, Xiaorong Morrow |
2008-11-25 |
$14,078,000 |
| 7422020 |
Aluminum incorporation in porous dielectric for improved mechanical properties of patterned dielectric |
Vijayakumar Ramachandrarao |
2008-09-09 |
$18,766,000 |
| 7365375 |
Organic-framework zeolite interlayer dielectrics |
Michael Goodner, Mansour Moinpour, Boyan Boyanov |
2008-04-29 |
$13,885,000 |
| 7354862 |
Thin passivation layer on 3D devices |
Lawrence Wong, Lawrence Foley |
2008-04-08 |
$22,423,000 |
| 7344972 |
Photosensitive dielectric layer |
Michael Goodner, Kevin P. O'Brien, Robert Meagley |
2008-03-18 |
$17,443,000 |
| 7335586 |
Sealing porous dielectric material using plasma-induced surface polymerization |
Vijayakumar Ramachandrarao, Boyan Boyanov, Hyun-Mog Park |
2008-02-26 |
$16,748,000 |
| 7332406 |
Air gap interconnect structure and method |
Hyun-Mog Park |
2008-02-19 |
$15,849,000 |
| 7320928 |
Method of forming a stacked device filler |
David Staintes, Shriram Ramanathan |
2008-01-22 |
$26,995,000 |
| 7303989 |
Using zeolites to improve the mechanical strength of low-k interlayer dielectrics |
Boyan Boyanov, Michael Goodner |
2007-12-04 |
$21,616,000 |
| 7294568 |
Formation of air gaps in an interconnect structure using a thin permeable hard mask and resulting structures |
Michael Goodner, Kevin P. O'Brien |
2007-11-13 |
$26,433,000 |
| 7294934 |
Low-K dielectric structure and method |
Xiarong Morrow, Jihperng Leu |
2007-11-13 |
$26,433,000 |
| 7238604 |
Forming thin hard mask over air gap or porous dielectric |
Kevin P. O'Brien, David H. Gracias, Hyun-Mog Park, Vijayakumar Ramachandrarao |
2007-07-03 |
$20,127,000 |
