| 12261057 |
Textile patterning for subtractively-patterned self-aligned interconnects, plugs, and vias |
Kevin Lin, Alan M. Myers |
2025-03-25 |
|
| 12218052 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more |
2025-02-04 |
|
| 12165987 |
Frame reveals with maskless lithography in the manufacture of integrated circuits |
Grant Kloster |
2024-12-10 |
$13,394,000 |
| 12107044 |
Metal oxycarbide resists as leave behind plugs |
Marie Krysak, Kevin Lin, Charles H. Wallace |
2024-10-01 |
$20,560,000 |
| 12037434 |
Chemical compositions and methods of patterning microelectronic device structures |
Eungnak Han, Gurpreet Singh, Tayseer Mahdi, Florian Gstrein, Lauren Doyle +2 more |
2024-07-16 |
$26,089,000 |
| 12012473 |
Directed self-assembly structures and techniques |
James M. Blackwell, Xuanxuan Chen, Lauren Doyle, Florian Gstrein, Eungnak Han +6 more |
2024-06-18 |
$26,452,000 |
| 11955377 |
Differential hardmasks for modulation of electrobucket sensitivity |
Kevin Lin, James M. Blackwell, Rami Hourani, Marie Krysak |
2024-04-09 |
$27,197,000 |
| 11955343 |
Two-stage bake photoresist with releasable quencher |
Marie Krysak, James M. Blackwell, Florian Gstrein, Kent N. FRASURE |
2024-04-09 |
$27,197,000 |
| 11953826 |
Lined photobucket structure for back end of line (BEOL) interconnect formation |
James M. Blackwell, Marie Krysak, Florian Gstrein, Eungnak Han, Kevin Lin +2 more |
2024-04-09 |
$27,197,000 |
| 11874600 |
Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists |
Marie Krysak, James M. Blackwell, Florian Gstrein |
2024-01-16 |
$42,805,000 |
| 11854882 |
Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects |
Kevin Lin, Richard E. Schenker |
2023-12-26 |
|
| 11854787 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more |
2023-12-26 |
$39,948,000 |
| 11846883 |
Chain scission photoresists and methods for forming chain scission photoresists |
Marie Krysak, Lauren Doyle, James M. Blackwell, Eungnak Han |
2023-12-19 |
$50,836,000 |
| 11594599 |
Quantum dot array devices |
James S. Clarke, Ravi Pillarisetty, Jeanette M. Roberts, Hubert C. George, Nicole K. Thomas |
2023-02-28 |
$10,430,000 |
| 11373900 |
Damascene plug and tab patterning with photobuckets |
Kevin Lin, Richard E. Schenker |
2022-06-28 |
$15,065,000 |
| 11373950 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more |
2022-06-28 |
$15,065,000 |
| 11320734 |
Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists |
Marie Krysak, James M. Blackwell, Florian Gstrein |
2022-05-03 |
$16,346,000 |
| 11315798 |
Two-stage bake photoresist with releasable quencher |
Marie Krysak, James M. Blackwell, Florian Gstrein, Kent N. FRASURE |
2022-04-26 |
$25,630,000 |
| 11300885 |
EUV phase-shift SRAF masks by means of embedded phase shift layers |
Guojing Zhang, Tristan A. Tronic, John Magana, Chang Ju Choi, Arvind Sundaramurthy +1 more |
2022-04-12 |
$16,909,000 |
| 11276581 |
Textile patterning for subtractively-patterned self-aligned interconnects, plugs, and vias |
Kevin Lin, Alan M. Myers |
2022-03-15 |
$18,336,000 |
| 11251072 |
Differential hardmasks for modulation of electrobucket sensitivity |
Kevin Lin, James M. Blackwell, Rami Hourani, Marie Krysak |
2022-02-15 |
$14,138,000 |
| 11189790 |
Spacer-based patterning for tight-pitch and low-variability random access memory (RAM) bit cells and the resulting structures |
Kevin Lin, Sarah Atanasov, Kevin P. O'Brien |
2021-11-30 |
$30,212,000 |
| 11137681 |
Lined photobucket structure for back end of line (BEOL) interconnect formation |
James M. Blackwell, Marie Krysak, Florian Gstrein, Eungnak Han, Kevin Lin +2 more |
2021-10-05 |
$23,463,000 |
| 11069609 |
Techniques for forming vias and other interconnects for integrated circuit structures |
Sasikanth Manipatruni, Jasmeet S. Chawla, Chia-Ching Lin, Dmitri E. Nikonov, Ian A. Young |
2021-07-20 |
$44,320,000 |
| 10957844 |
Magneto-electric spin orbit (MESO) structures having functional oxide vias |
Jasmeet S. Chawla, Sasikanth Manipatruni, Chia-Ching Lin, Dmitri E. Nikonov, Ian A. Young |
2021-03-23 |
$29,278,000 |
