| 12218052 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell +6 more |
2025-02-04 |
|
| 12107044 |
Metal oxycarbide resists as leave behind plugs |
Kevin Lin, Robert L. Bristol, Charles H. Wallace |
2024-10-01 |
$20,560,000 |
| 12037434 |
Chemical compositions and methods of patterning microelectronic device structures |
Eungnak Han, Gurpreet Singh, Tayseer Mahdi, Florian Gstrein, Lauren Doyle +2 more |
2024-07-16 |
$26,089,000 |
| 12012473 |
Directed self-assembly structures and techniques |
James M. Blackwell, Robert L. Bristol, Xuanxuan Chen, Lauren Doyle, Florian Gstrein +6 more |
2024-06-18 |
$26,452,000 |
| 11984317 |
EUV patterning methods, structures, and materials |
James M. Blackwell, Lauren Doyle, Brian Zaccheo, Patrick Theofanis, Michael Robinson +1 more |
2024-05-14 |
$33,809,000 |
| 11953826 |
Lined photobucket structure for back end of line (BEOL) interconnect formation |
James M. Blackwell, Robert L. Bristol, Florian Gstrein, Eungnak Han, Kevin Lin +2 more |
2024-04-09 |
$27,197,000 |
| 11955343 |
Two-stage bake photoresist with releasable quencher |
Robert L. Bristol, James M. Blackwell, Florian Gstrein, Kent N. FRASURE |
2024-04-09 |
$27,197,000 |
| 11955377 |
Differential hardmasks for modulation of electrobucket sensitivity |
Kevin Lin, Robert L. Bristol, James M. Blackwell, Rami Hourani |
2024-04-09 |
$27,197,000 |
| 11874600 |
Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists |
James M. Blackwell, Robert L. Bristol, Florian Gstrein |
2024-01-16 |
$42,805,000 |
| 11862463 |
Metal oxide nanoparticles as fillable hardmask materials |
Florian Gstrein, Manish Chandhok |
2024-01-02 |
$30,016,000 |
| 11854787 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell +6 more |
2023-12-26 |
$39,948,000 |
| 11846883 |
Chain scission photoresists and methods for forming chain scission photoresists |
Robert L. Bristol, Lauren Doyle, James M. Blackwell, Eungnak Han |
2023-12-19 |
$50,836,000 |
| 11406972 |
Activation of protected cross-linking catalysts during formation of dielectric materials |
James M. Blackwell, David J. Michalak, Jessica M. Torres, Jeffery D. Bielefeld |
2022-08-09 |
$13,688,000 |
| 11373950 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell +6 more |
2022-06-28 |
$15,065,000 |
| 11320734 |
Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists |
James M. Blackwell, Robert L. Bristol, Florian Gstrein |
2022-05-03 |
$16,346,000 |
| 11315798 |
Two-stage bake photoresist with releasable quencher |
Robert L. Bristol, James M. Blackwell, Florian Gstrein, Kent N. FRASURE |
2022-04-26 |
$25,630,000 |
| 11262654 |
Chain scission resist compositions for EUV lithography applications |
Lauren Doyle, Patrick Theofanis, James M. Blackwell, Eungnak Han |
2022-03-01 |
$16,941,000 |
| 11251072 |
Differential hardmasks for modulation of electrobucket sensitivity |
Kevin Lin, Robert L. Bristol, James M. Blackwell, Rami Hourani |
2022-02-15 |
$14,138,000 |
| 11227766 |
Metal oxide nanoparticles as fillable hardmask materials |
Florian Gstrein, Manish Chandhok |
2022-01-18 |
$31,898,000 |
| 11217456 |
Selective etching and controlled atomic layer etching of transition metal oxide films for device fabrication |
James M. Blackwell, Scott B. Clendenning, Cen Tan |
2022-01-04 |
$22,100,000 |
| 11152254 |
Pitch quartered three-dimensional air gaps |
Manish Chandhok, Sudipto Naskar, Stephanie A. Bojarski, Kevin Lin, Tristan A. Tronic +3 more |
2021-10-19 |
$36,352,000 |
| 11137681 |
Lined photobucket structure for back end of line (BEOL) interconnect formation |
James M. Blackwell, Robert L. Bristol, Florian Gstrein, Eungnak Han, Kevin Lin +2 more |
2021-10-05 |
$23,463,000 |
| 11024538 |
Hardened plug for improved shorting margin |
Kevin Lin, Tayseer Mahdi, Jessica M. Torres, Jeffery D. Bielefeld, James M. Blackwell |
2021-06-01 |
$35,542,000 |
| 10971394 |
Maskless air gap to prevent via punch through |
Manish Chandhok, Todd R. Younkin, Eungnak Han, Jasmeet S. Chawla, Hui Jae Yoo +1 more |
2021-04-06 |
$36,336,000 |
| 10892223 |
Advanced lithography and self-assembled devices |
Richard E. Schenker, Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell +6 more |
2021-01-12 |
$55,416,000 |
