Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209975 | Real-time detection of deflections and ruptures of EUV pellicle membranes | Guojing Zhang | 2025-01-28 |
| 11604406 | Method and apparatus for fabrication of very large scale integration pattern features via electroless deposition on extreme ultraviolet lithography photomasks | Guojing Zhang, Yang Cao | 2023-03-14 |
| 11561466 | Monolithically framed pellicle membrane suitable for lithography in the fabrication of integrated circuits | Guojing Zhang | 2023-01-24 |
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, Chang Ju Choi, Arvind Sundaramurthy +1 more | 2022-04-12 |
| 11194246 | Monolithically framed pellicle membrane suitable for lithography in the fabrication of integrated circuits | Guojing Zhang | 2021-12-07 |
| 8072016 | EPI substrate with low doped EPI layer and high doped Si substrate layer for media growth on EPI and low contact resistance to back-side substrate | Ajay Jain, Valluri Rao | 2011-12-06 |
| 7692757 | Wafer scale fabrication of liquid crystal on silicon light modulation devices | — | 2010-04-06 |
| 6891592 | Wafer level electro-optical sort testing and wafer level assembly of micro liquid crystal-on silicon (LCOS) devices | M. Lawrence A. Dass | 2005-05-10 |