Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, John Magana, Arvind Sundaramurthy +1 more | 2022-04-12 |
| 8679706 | Photomask processing techniques | — | 2014-03-25 |
| 8399158 | High resolution phase shift mask | Cheng-Hsin Ma, Sven Henrichs, Robert H. Olshausen, Yulia Korobko | 2013-03-19 |
| 7205164 | Methods for fabricating magnetic cell junctions and a structure resulting and/or used for such methods | Sam Geha, Benjamin Schwarz, Biju Parameshwaran, Eugene Chen, Helen L. Chung +2 more | 2007-04-17 |
| 6759339 | Method for plasma etching a microelectronic topography using a pulse bias power | Benjamin Schwarz | 2004-07-06 |
| 6391659 | Methods for fabricating ferroelectric memory devices using pulsed-power plasma | O-Sung Kwon | 2002-05-21 |
| 5785797 | Method and apparatus for monitoring etching by products | — | 1998-07-28 |
| 5726067 | Method of and apparatus for monitoring etching by-products | — | 1998-03-10 |