Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955739 | Consistent mask targeting through standardized drop-in-cells | Harsha Grunes, Christopher KENYON | 2021-03-23 |
| 9046761 | Lithography mask having sub-resolution phased assist features | Shem Ogadhoh, Charles H. Wallace, Ryan Pearman, Arvind Sundaramurthy, Swaminathan Sivakumar | 2015-06-02 |
| 8399158 | High resolution phase shift mask | Chang Ju Choi, Cheng-Hsin Ma, Robert H. Olshausen, Yulia Korobko | 2013-03-19 |
| 7816061 | Lithography masks for improved line-end patterning | Richard E. Schenker, Swaminathan Sivakumar, Paul A. Nyhus | 2010-10-19 |
| 7056625 | Focus detection structure | Jose J. Garcia | 2006-06-06 |