Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7214452 | Using perfluoropoly-ethers to form pellicles | James M. Powers | 2007-05-08 |
| 7192686 | Photoacid generators based on novel superacids | — | 2007-03-20 |
| 7169715 | Forming a dielectric layer using porogens | Andrew Ott, Grant Kloster, Michael Goodner | 2007-01-30 |
| 7166413 | Enabling chain scission of branched photoresist | Heidi Cao | 2007-01-23 |
| 7138158 | Forming a dielectric layer using a hydrocarbon-containing precursor | Michael Goodner, Andrew Ott, Grant Kloster, Michael L. McSwiney, Bob Leet | 2006-11-21 |
| 7135419 | Line edge roughness reduction | Manish Chandhok | 2006-11-14 |
| 7101798 | Method to modulate etch rate in SLAM | Michael Goodner, Kevin P. O'Brien | 2006-09-05 |
| 7089785 | Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity | Hok-Kin Choi | 2006-08-15 |
| 7084053 | Unidirectionally conductive materials for interconnection | Reza Golzarian, Seiichi Morimoto, Mansour Moinpour | 2006-08-01 |
| 7071125 | Precursors for film formation | Michael L. McSwiney, Huey-Chiang Liou, Michael Goodner, Robert Leet | 2006-07-04 |
| 7029723 | Forming chemical vapor depositable low dielectric constant layers | Tian-An Chen, Kevin P. O'Brien, Michael Goodner, James M. Powers | 2006-04-18 |
| 7018920 | Composite sacrificial material | Michael Goodner | 2006-03-28 |
| 6991893 | Controlling resist profiles through substrate modification | Michael Goodner, Michael J. Leeson | 2006-01-31 |
| 6908717 | Positive photosensitive resin composition, process for its preparation, and semiconductor devices | Takashi Hirano, Shusaku Okaaki, Michael Goodner | 2005-06-21 |
| 6872505 | Enabling chain scission of branched photoresist | Heidi Cao | 2005-03-29 |
| 6872513 | Photoresist edge correction | — | 2005-03-29 |
| 6858528 | Composite sacrificial material | Michael Goodner | 2005-02-22 |
| 6833320 | Removing sacrificial material by thermal decomposition | Peter K. Moon, Kevin P. O'Brien | 2004-12-21 |
| 6566280 | Forming polymer features on a substrate | Michael Goodner | 2003-05-20 |