Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723008 | Photoactive adhesion promoter in a slam | Robert Meagley, Kevin P. O'Brien | 2010-05-25 |
| 7718528 | Photoactive adhesion promoter in a SLAM | Robert Meagley, Kevin P. O'Brien | 2010-05-18 |
| 7459260 | Method of reducing sensitivity of EUV photoresists to out-of-band radiation and EUV photoresists formed according to the method | Manish Chandhok, Wang Yueh | 2008-12-02 |
| 7442487 | Low outgassing and non-crosslinking series of polymers for EUV negative tone photoresists | Wang Yueh, Manish Chandhok | 2008-10-28 |
| 7427463 | Photoresists with reduced outgassing for extreme ultraviolet lithography | Wang Yueh | 2008-09-23 |
| 7374867 | Enhancing photoresist performance using electric fields | Robert L. Bristol, Manish Chandhok, Robert Meagley, Vijayakumar Ramachandrarao | 2008-05-20 |
| 7226718 | Non-outgassing low activation energy resist | Wang Yueh, Jeanette M. Roberts | 2007-06-05 |
| 7166413 | Enabling chain scission of branched photoresist | Robert Meagley | 2007-01-23 |
| 7147986 | Resist compounds including acid labile groups attached to polymeric chains at anhydride linkages | Wang Yueh | 2006-12-12 |
| 7005227 | One component EUV photoresist | Wang Yueh | 2006-02-28 |
| 6872505 | Enabling chain scission of branched photoresist | Robert Meagley | 2005-03-29 |