| 7723008 |
Photoactive adhesion promoter in a slam |
Robert Meagley, Kevin P. O'Brien |
2010-05-25 |
| 7718528 |
Photoactive adhesion promoter in a SLAM |
Robert Meagley, Kevin P. O'Brien |
2010-05-18 |
| 7459260 |
Method of reducing sensitivity of EUV photoresists to out-of-band radiation and EUV photoresists formed according to the method |
Manish Chandhok, Wang Yueh |
2008-12-02 |
| 7442487 |
Low outgassing and non-crosslinking series of polymers for EUV negative tone photoresists |
Wang Yueh, Manish Chandhok |
2008-10-28 |
| 7427463 |
Photoresists with reduced outgassing for extreme ultraviolet lithography |
Wang Yueh |
2008-09-23 |
| 7374867 |
Enhancing photoresist performance using electric fields |
Robert L. Bristol, Manish Chandhok, Robert Meagley, Vijayakumar Ramachandrarao |
2008-05-20 |
| 7226718 |
Non-outgassing low activation energy resist |
Wang Yueh, Jeanette M. Roberts |
2007-06-05 |
| 7166413 |
Enabling chain scission of branched photoresist |
Robert Meagley |
2007-01-23 |
| 7147986 |
Resist compounds including acid labile groups attached to polymeric chains at anhydride linkages |
Wang Yueh |
2006-12-12 |
| 7005227 |
One component EUV photoresist |
Wang Yueh |
2006-02-28 |
| 6872505 |
Enabling chain scission of branched photoresist |
Robert Meagley |
2005-03-29 |