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Home › Method of reducing sensitivity of EUV photoresists to out-of-band radiation and EUV photoresists formed according to the method

Method of reducing sensitivity of EUV photoresists to out-of-band radiation and EUV photoresists formed according to the method

US Patent 7459260 · Granted Dec 2, 2008

Estimated economic value: $16,850,000 ⓘ

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