Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7618548 | Silicon-containing structure with deep etched features, and method of manufacture | Jeffrey D. Chinn, Michael Rattner, Yanping Li | 2009-11-17 |
| 7074723 | Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system | Jeffrey D. Chinn, Michael Rattner, Yanping Li | 2006-07-11 |