Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372655 | Two etchant etch method | Anisul Khan, Ajay Kumar, Dragan Podlesnik | 2002-04-16 |
| 6372151 | Storage poly process without carbon contamination | Taeho Shin, Nam Hun Kim | 2002-04-16 |
| 6368978 | Hydrogen-free method of plasma etching indium tin oxide | Ajay Kumar, Padmapani Nallan | 2002-04-09 |
| 6322714 | Process for etching silicon-containing material on substrates | Padmapani Nallan, Stephen Yuen | 2001-11-27 |
| 6318384 | Self cleaning method of forming deep trenches in silicon substrates | Anisul Khan, Ajay Kumar, Dragan Podlesnik | 2001-11-20 |
| 6312616 | Plasma etching of polysilicon using fluorinated gas mixtures | Taeho Shin, Nam Hun Kim | 2001-11-06 |
| 6303513 | Method for controlling a profile of a structure formed on a substrate | Anisul Khan, Ajay Kumar, Dragan Podlesnik | 2001-10-16 |
| 6270634 | Method for plasma etching at a high etch rate | Ajay Kumar, Anisul Khan, Dragan Podlesnik | 2001-08-07 |
| 6245684 | Method of obtaining a rounded top trench corner for semiconductor trench etch applications | Ganming Zhao | 2001-06-12 |
| 6235214 | Plasma etching of silicon using fluorinated gas mixtures | Shashank Deshmukh | 2001-05-22 |
| 6136211 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Gerald Yin +5 more | 2000-10-24 |
| 6132631 | Anisotropic silicon nitride etching for shallow trench isolation in an high density plasma system | Padmapani Nallan, Ajay Kumar | 2000-10-17 |
| 6103632 | In situ Etching of inorganic dielectric anti-reflective coating from a substrate | Ajay Kumar | 2000-08-15 |
| 6037265 | Etchant gas and a method for etching transistor gates | David Mui, Ajay Kumar | 2000-03-14 |
| 5939647 | Surface particle sampling head having a rotatable probe | Justin Lowe | 1999-08-17 |
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Shashank Deshmukh, Weinan Jiang, Brian Duda, Rolf Guenther +3 more | 1999-04-13 |
| 5851926 | Method for etching transistor gates using a hardmask | Ajay Kumar, Shashank Deshmukh, Weinan Jiang, Rolf Guenther, Bruce Minaee +1 more | 1998-12-22 |
| 5223443 | Method for determining wafer cleanliness | Ciaran Hanrahan | 1993-06-29 |
| 5117276 | High performance interconnect system for an integrated circuit | Michael E. Thomas | 1992-05-26 |
| 5000818 | Method of fabricating a high performance interconnect system for an integrated circuit | Michael E. Thomas | 1991-03-19 |
| 4933743 | High performance interconnect system for an integrated circuit | Michael E. Thomas | 1990-06-12 |