Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7074298 | High density plasma CVD chamber | Sudhir Gondhalekar, Tom K. Cho, Rolf Guenther, Shigeru Takehiro, Tetsuya Ishikawa +1 more | 2006-07-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7074298 | High density plasma CVD chamber | Sudhir Gondhalekar, Tom K. Cho, Rolf Guenther, Shigeru Takehiro, Tetsuya Ishikawa +1 more | 2006-07-11 |