Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065789 | Method of fabricating a heated substrate support | Rolf Guenther | 2011-11-29 |
| 7674338 | Heated substrate support and method of fabricating same | Rolf Guenther | 2010-03-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065789 | Method of fabricating a heated substrate support | Rolf Guenther | 2011-11-29 |
| 7674338 | Heated substrate support and method of fabricating same | Rolf Guenther | 2010-03-09 |