Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354501 | Upper chamber for high density plasma CVD | Sudhir Gondhalekar, Tom K. Cho, Rolf Guenther, Steve Kim, Shigeru Takehiro +2 more | 2008-04-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354501 | Upper chamber for high density plasma CVD | Sudhir Gondhalekar, Tom K. Cho, Rolf Guenther, Steve Kim, Shigeru Takehiro +2 more | 2008-04-08 |