Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12330260 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan | 2025-06-17 |
| 11618124 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan | 2023-04-04 |
| 10744618 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan | 2020-08-18 |
| 9731397 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan | 2017-08-15 |
| 9272387 | Carrier head with shims | Stacy Meyer, Young J. Paik | 2016-03-01 |
| 8961266 | Polishing pad with secondary window seal | Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan | 2015-02-24 |
| 8662957 | Leak proof pad for CMP endpoint detection | Young J. Paik, Ashish Bhatnagar, Kadthala Ramaya Narendrnath | 2014-03-04 |
| 7045014 | Substrate support assembly | Abhijit Desai | 2006-05-16 |