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Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan |
2025-06-17 |
| 11618124 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan |
2023-04-04 |
| 10744618 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan |
2020-08-18 |
| 9731397 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan |
2017-08-15 |
| 9272387 |
Carrier head with shims |
Stacy Meyer, Young J. Paik |
2016-03-01 |
| 8961266 |
Polishing pad with secondary window seal |
Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Periya Gopalan |
2015-02-24 |
| 8662957 |
Leak proof pad for CMP endpoint detection |
Young J. Paik, Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2014-03-04 |
| 7045014 |
Substrate support assembly |
Abhijit Desai |
2006-05-16 |