Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7288746 | Integrated thermal unit having laterally adjacent bake and chill plates on different planes | Tetsuya Ishikawa | 2007-10-30 |
| 7282675 | Integrated thermal unit having a shuttle with a temperature controlled surface | Martin Jeff Salinas | 2007-10-16 |
| 7274005 | Bake plate having engageable thermal mass | Tetsuya Ishikawa | 2007-09-25 |
| 7049612 | Electron beam treatment apparatus | Jun Zhao | 2006-05-23 |