Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6215106 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Brian Haas, Dean Jennings | 2001-04-10 |
| 6164816 | Tuning a substrate temperature measurement system | Abhilash J. Mayur, Peter A. Knoot | 2000-12-26 |
| 5343293 | Ellipsometer | Rudolf Berger, Heiner Ryssel, Claus Schneider | 1994-08-30 |