Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784445 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Jürgen Ziegler, Reinhold Waller, Lothar Pfitzner, Claus Schneider, Volker Tegeder | 2004-08-31 |
| 6089548 | Process and device for converting a liquid stream flow into a gas stream flow | Lothar Pfitzner, Piotr Strzyzewski, Georg Roeder | 2000-07-18 |
| 6087615 | Ion source for an ion beam arrangement | Rainer Schork | 2000-07-11 |
| 5343293 | Ellipsometer | Rudolf Berger, Claus Schneider, Wolfgang Aderhold | 1994-08-30 |