Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094442 | Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbon | Martin Jay Seamons, Wendy H. Yeh, Heraldo Botelho | 2006-08-22 |
| 6946401 | Plasma treatment for copper oxide reduction | Judy H. Huang, Christopher Dennis Bencher, Christopher S. Ngai, Bok Hoen Kim | 2005-09-20 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +4 more | 2005-08-09 |
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Wendy H. Yeh, Sang-Hoon Ahn, Christopher Dennis Bencher, Hichem M'Saad | 2005-02-08 |
| 6734102 | Plasma treatment for copper oxide reduction | Ping Xu, Judy H. Huang | 2004-05-11 |
| 6700202 | Semiconductor device having reduced oxidation interface | Judy H. Huang, Christopher Dennis Bencher, Christopher S. Ngai, Bok Hoen Kim | 2004-03-02 |
| 6541369 | Method and apparatus for reducing fixed charges in a semiconductor device | Judy H. Huang, Chris Bencher | 2003-04-01 |
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Judy H. Huang, Christopher Dennis Bencher, Christopher S. Ngai, Bok Hoen Kim | 2002-03-12 |