Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8211626 | Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizes | Sang-Hoon Ahn, Sudha Rathi | 2012-07-03 |
| 8088563 | Reduction in photoresist footing undercut during development of feature sizes of 120NM or less | Sang-Hoon Ahn, Sudha Rathi | 2012-01-03 |