Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Canfeng Lai, Zhengquan Tan, Steve Kim, Alexander Veyster | 2004-01-27 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Walter Zygmunt, Tetsuya Ishikawa | 2003-07-22 |