Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5872401 | Deposition of an inter layer dielectric formed on semiconductor wafer by sub atmospheric CVD | Brett E. Huff | 1999-02-16 |
| 5426076 | Dielectric deposition and cleaning process for improved gap filling and device planarization | — | 1995-06-20 |
| 5389581 | High density TEOS-based film for intermetal dielectrics | Philip E. Freiberger, Ragupathy V. Giridhar, Brett E. Huff | 1995-02-14 |
| 5326723 | Method for improving stability of tungsten chemical vapor deposition | William George Petro | 1994-07-05 |
| 5260236 | UV transparent oxynitride deposition in single wafer PECVD system | William George Petro | 1993-11-09 |