Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734115 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2004-05-11 |
| 6706138 | Adjustable dual frequency voltage dividing plasma reactor | Michael Barnes, John Holland, Alexander Paterson, Valentin Todorov | 2004-03-16 |
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2003-12-30 |
| 6667248 | Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers | Hichem M'Saad, Chad Peterson, Zhuang Li, Anchuan Wang | 2003-12-23 |
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-12-09 |
| 6632735 | Method of depositing low dielectric constant carbon doped silicon oxide | Wai-Fan Yau, Ju-Hyung Lee, Nasreen Chopra, Tzu-Fang Huang, David Cheung +5 more | 2003-10-14 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-07-22 |
| 6593247 | Method of depositing low k films using an oxidizing plasma | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2003-07-15 |
| 6583071 | Ultrasonic spray coating of liquid precursor for low K dielectric coatings | Timothy Weidman, Yunfeng Lu, Michael P. Nault, Michael Barnes | 2003-06-24 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-05-13 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-04-01 |
| 6521546 | Method of making a fluoro-organosilicate layer | Michael Barnes, Hichem M'Saad, Huong Nguyen | 2003-02-18 |
| 6511923 | Deposition of stable dielectric films | Yaxin Wang, Michael Barnes, Thanh Pham | 2003-01-28 |
| 6495470 | Contact and via fabrication technologies | S. M. Reza Sadjadi, Mansour Moinpour, Te Hua Lin | 2002-12-17 |
| 6448187 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal | 2002-09-10 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau, Chi-I Lang +4 more | 2002-07-02 |
| 6410457 | Method for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Dana Tribula, Manoj Vellaikal, Sameer Desai | 2002-06-25 |
| 6383954 | Process gas distribution for forming stable fluorine-doped silicate glass and other films | Yaxin Wang, Diana Chan, Turgut Sahin, Tetsuya Ishikawa | 2002-05-07 |
| 6348725 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2002-02-19 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2002-01-22 |
| 6303523 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2001-10-16 |
| 6245690 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal | 2001-06-12 |
| 6170428 | Symmetric tunable inductively coupled HDP-CVD reactor | Fred C. Redeker, Hiroji Hanawa, Tetsuya Ishikawa, Dan Maydan, Shijian Li +5 more | 2001-01-09 |
| 5883436 | Contact and via fabrication technologies | S. M. Reza Sadjadi, Mansour Moinpour, Te Hua Lin | 1999-03-16 |
| 5872064 | DSAD process for deposition of inter layer dielectric | Brett E. Huff | 1999-02-16 |