Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6220941 | Method of post CMP defect stability improvement | Boris Fishkin, Charles C. Garretson, Peter McKeever, Thomas H. Osterheld, Doyle E. Bennett +2 more | 2001-04-24 |
| 6220942 | CMP platen with patterned surface | Robert D. Tolles, Steven T. Mear, Sidney P. Huey, Fred C. Redeker | 2001-04-24 |
| 6217426 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Steven M. Zuniga, Hung Chih Chen | 2001-04-17 |
| 6132298 | Carrier head with edge control for chemical mechanical polishing | Steven M. Zuniga, Hung Chih Chen | 2000-10-17 |