Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7207871 | Carrier head with multiple chambers | Steven M. Zuniga, Hung Chih Chen, Thomas Brezoczky | 2007-04-24 |
| 6592438 | CMP platen with patterned surface | Robert D. Tolles, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |
| 6439964 | Method of controlling a polishing machine | Gopalakrishna B. Prahbu | 2002-08-27 |
| 6361419 | Carrier head with controllable edge pressure | Steven M. Zuniga, Gopalakrishna B. Prahbu | 2002-03-26 |
| 6220942 | CMP platen with patterned surface | Robert D. Tolles, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2001-04-24 |
| 6217426 | CMP polishing pad | Robert D. Tolles, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2001-04-17 |