| 7841925 |
Polishing article with integrated window stripe |
Gregory E. Menk, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung |
2010-11-30 |
| 7601050 |
Polishing apparatus with grooved subpad |
Steven M. Zuniga, Erik S. Rondum, Benjamin A. Bonner, Henry H. Au, Gregory E. Menk +3 more |
2009-10-13 |
| 7553214 |
Polishing article with integrated window stripe |
Gregory E. Menk, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung |
2009-06-30 |
| 7429210 |
Materials for chemical mechanical polishing |
Benjamin A. Bonner, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu, Erik S. Rondum +2 more |
2008-09-30 |
| 7179159 |
Materials for chemical mechanical polishing |
Benjamin A. Bonner, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu, Erik S. Rondum +2 more |
2007-02-20 |
| 7063597 |
Polishing processes for shallow trench isolation substrates |
Gopalakrishna B. Prabhu, Thomas H. Osterheld, Garlen C. Leung, Adam Zhong, Yi Tao +3 more |
2006-06-20 |