Techniques for combining CMP process tracking data with 3D printed CMP consumables

Assignee

• Applied Materials

Inventors

• Jason Garcheung Fung (35 patents)
• Rajeev Bajaj (112 patents)
• Daniel Redfield (49 patents)
• Aniruddh Jagdish Khanna (8 patents)
• Mario CORNEJO (10 patents)
• Gregory E. Menk (32 patents)
• John E. Watkins (40 patents)

View full patent text on Google Patents →