Integrated abrasive polishing pads and manufacturing methods

Assignee

• Applied Materials

Inventors

• Ashavani Kumar (27 patents)
• Ashwin CHOCKALINGAM (25 patents)
• Sivapackia Ganapathiappan (167 patents)
• Rajeev Bajaj (112 patents)
• Boyi Fu (27 patents)
• Daniel Redfield (49 patents)
• Nag B. Patibandla (112 patents)
• Mario CORNEJO (10 patents)
• Amritanshu Sinha (5 patents)
• Yan Zhao (15 patents)
• Ranga Rao Arnepalli (13 patents)
• Fred C. Redeker (169 patents)

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