Additive manufacturing of polishing pads

Assignee

• Applied Materials

Inventors

• Yingdong Luo (27 patents)
• Sivapackia Ganapathiappan (167 patents)
• Ashwin CHOCKALINGAM (25 patents)
• Daihua Zhang (38 patents)
• Uma Sridhar (4 patents)
• Daniel Redfield (49 patents)
• Rajeev Bajaj (112 patents)
• Nag B. Patibandla (112 patents)
• Hou T. Ng (184 patents)
• Sudhakar Madhusoodhanan (4 patents)

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